Effect of elastic element on self-excited electrostatic actuator
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2018
ISSN: 0924-4247
DOI: 10.1016/j.sna.2018.06.045